316L Stainless Steel for Semiconductor UHP Gas Systems
A semiconductor gas line and a stainless steel vacuum chamber may operateinside the same fabrication facility, but they do not create the samematerial specification. For ultra-high-purity gas delivery, the stainless steel must be evaluatednot only for corrosion resistance and weldability, but also for materialcleanliness, wetted-surface condition, fabrication and contamination control. Type 316L / UNS S31603 […]